Specifications
static mode
spring constant @ 1,0µm cantilever thickness
- 23mN/m @ l=500µm
- 7mN/m @ l=750µm
- 3mN/m @ l=1000µm
spring constant @ 1,0µm cantilever thickness
- 23mN/m @ l=500µm
- 7mN/m @ l=750µm
- 3mN/m @ l=1000µm
dynamic mode
resonance frequency @ 5,0 mm cantilever thickness
- 24,3 kHz @ l=500µm
- 10,8 kHz @ l=750µm
- 6,1 kHz @ l=1000µm
resonance frequency @ 5,0 mm cantilever thickness
- 24,3 kHz @ l=500µm
- 10,8 kHz @ l=750µm
- 6,1 kHz @ l=1000µm
Further cantilever dimensions
Thickness within one chip +- 50nm
Length variations +- 4µm
Cantilever witdh 90 +- 2µm
Pitch of cantilevers 250µm
Thickness within one chip +- 50nm
Length variations +- 4µm
Cantilever witdh 90 +- 2µm
Pitch of cantilevers 250µm